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SAN JOSE -- North America-based semiconductor equipment manufacturers reported the 90-day moving average orders rose 16% sequentially in to $288.5 million.

The book-to-bill ratio was 0.74, SEMI said. A book-to-bill of 0.74 means that $74 worth of orders were received for every $100 of product billed for the month. Still, the ratio is up 0.09 points from April's revised figure, and at its highest point since December.

Orders are down 72% year-over-year.

For the month, the 90-day average worldwide billings was $391.9 million, up 1% from the revised April level and down 72% from May 2008.

"Bookings for the North American semiconductor equipment market are still near historically low levels, though the sharp declines have subsided,” said Dan Tracy, senior director of Industry Research and Statistics at SEMI. “While recent industry data show increased semiconductor device unit sales, the industry is waiting for stronger signals to increase capital investments.”

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