DM8000 M and DM12000 M are for 8" or 12" wafers, respectively. The integrated macro mode of the optical inspection microscopes reportedly provides up to 4x the field of view of conventional scanning objectives; entire scan area can be checked for possible defects. LED illumination is integrated in the stand. Optional i-line UV illumination is based on LED. Oblique UV mode combines oblique illumination with i-line UV light.

Leica Microsystems, www.leica-microsystems.com

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